Complete Non-Contact Inspection system for OLED/TFT/LTPS

  • Fastest
  • Workable to large panel as well as fine pattern of medium-small panel
  • Workable to large mother glass of every generation
  • Possible to dock width Repair Machine
Pattern damage, particles Causes no damage, particle-free
Reliability Minimizes possibility of measurement error due to dust on pattern surface
Change of inspection object By switching recipe, no need for physical readjustment
Tact time Approximately100 sec. G8 panel
Detectable pitch Minimum pitch 50um, minimum line width 3um
Running cost No running cost